A MICRO ANEMOMETER AND FABRICATION METHOD THEREFOR

摘要

A micro anemometer and its manufacturing method are provided to enhance a response time by reducing heat capacity using an enhanced arrangement of the micro anemometer. An oxide layer(102) is formed on a silicon substrate(101). A nitride layer(103) is deposited on the oxide layer. Two or more gold pads(104) are formed on the nitride layer. A conic gold supporter(108) is formed on the gold pad by using an electroplating process. A platinum wire sensor(109) is formed on the conic gold supporer. The platinum wire sensor is heated through the conic gold supporter. An air speed is measured by measuring a resistive value according to the variation of temperature of the platinum wire sensor due to the flow field passing the platinum wire sensor.