| 摘要 |
Provided is a test apparatus that tests a device under test, comprising a power supply that generates supply power supplied to the device under test; a transmission path that transmits the supply power generated by the power supply to the device under test; a high-capacitance capacitor that is provided between the transmission path and a ground potential; a low-capacitance capacitor that has a lower capacitance than the high-capacitance capacitor and that is provided between the transmission path and the ground potential at a position closer to the device under test than the high-capacitance capacitor is to the device under test; an intermediate capacitor that is provided between the transmission path and the ground potential at a position between the high-capacitance capacitor and the low-capacitance capacitor; and a current measuring section that measures current flowing through the transmission path between the intermediate capacitor and the low-capacitance capacitor.
|
