| 发明名称 |
THREE DIMENSIONAL STRUCTURE AND ITS MANUFACTURING METHOD |
| 摘要 |
A plurality of micro three-dimensional structure elements each having a movable structure fixed on a sacrifice layer, and fixation portions of the micro three-dimensional structure elements for the sacrifice layer are arranged into a film-like elastic body, and then the sacrifice layer is removed. Thus, a three-dimensional structure in which the individual micro three-dimensional structure elements are arranged independently of one another within the elastic body is manufactured.
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| 申请公布号 |
US2011014741(A1) |
申请公布日期 |
2011.01.20 |
| 申请号 |
US20100889821 |
申请日期 |
2010.09.24 |
| 申请人 |
SHIMOYAMA ISAO;MATSUMOTO KIYOSHI;HOSHINO KAZUNORI;NODA KENTARO;HACHITANI SHUJI;YOSHIDA HIDEHIRO;KOBAYASHI SHOICHI;NAKAMURA TOHRU |
发明人 |
SHIMOYAMA ISAO;MATSUMOTO KIYOSHI;HOSHINO KAZUNORI;NODA KENTARO;HACHITANI SHUJI;YOSHIDA HIDEHIRO;KOBAYASHI SHOICHI;NAKAMURA TOHRU |
| 分类号 |
H01L21/30 |
主分类号 |
H01L21/30 |
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