CHIMERIZED WAFER BOATS FOR USE IN SEMICONDUCTOR CHIP PROCESSING AND RELATED METHODS

摘要

The invention provides a wafer boat for housing a semiconductor or a solar wafer that includes at least one wafer support member containing at least one slot capable of receiving at least a portion of a peripheral edge of a wafer, wherein in the wafer support member comprises silicon carbide; and at least one structural member for conveying the wafer boat into and out of a processing device connected to the wafer support member, wherein the structural member is comprised of a ceramic material that is not silicon carbide. Also included are methods of manufacturing a wafer boat having increased durability and/or chip resistance.