发明名称 LIGHTING DEVICE, INSPECTION DEVICE INCLUDING THE SAME LIGHTING DEVICE, AND POSITION ADJUSTING METHOD OF LIGHTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a lighting device for easily performing position adjusting of an optical adaptor and an image sensor in a short time, and to provide an inspection device including the lighting device and a position adjusting method of the lighting device.SOLUTION: The lighting device 10 includes: an adaptor 20 which emits light from a light source 11 to form images by illumination light in inspecting regions of a plurality of image sensors 41; an adaptor driving part 15 which adjusts a relative positional relation with the image sensor 41; and an control part 6. The control part 6 contains: an initial setting part 65 which obtains position information of the center region of at least one image sensor of the plurality of image sensors as initial position information; and an adaptor displacement adjusting part 63 which calculates movement amount of the adaptor based on the initial position information.
申请公布号 JP2011014803(A) 申请公布日期 2011.01.20
申请号 JP20090159365 申请日期 2009.07.04
申请人 NIKON CORP 发明人 TAKEDA SHINSUKE
分类号 H01L21/66 主分类号 H01L21/66
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