| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser irradiation device and a laser irradiation method, which can perform the process of high quality.SOLUTION: The laser irradiation device includes: a laser emission device which emits laser pulses; a detection device which obtains data associated with a time waveform of the laser pulses emitted by the laser emission device; and a control device which controls a pulse width of the laser pulses emitted by the laser emission device based on the data associated with the time waveform of the laser pulses obtained by the detection device. |
