APPARATUS AND METHOD OF FABRICATING ZNO NANO STURCTURE

摘要

PURPOSE: An apparatus and method for manufacturing zinc oxide nanostructure is provided to maintain reaction temperature and to prevent suppression of vertical growth of the nanostructure. CONSTITUTION: A method for manufacturing a zinc oxide nanostructure comprises: a step of preparing a boat(112) in which zinc oxide powder and graphite powder are gradually laminated; a step of preparing a substrate(114) having a seed layer; a step of vertically arranging the boat and substrate in a reaction pipe(104); and a step of reducing the zinc oxide powder and graphite to generate zinc gas; and a step of forming a zinc oxide nanostructure on the substrate. The formation of the zinc oxide nanostructure is performed by carbothermal reduction method.