发明名称 SERVO-TYPE VIBRATION DETECTOR
摘要 PROBLEM TO BE SOLVED: To provide a servo-type vibration detector accurately determining the properties and the state of the vibration detector.SOLUTION: A movable plate 4a is provided to a pendulum 3 displaceable by external vibration. A fixed plate 4b is provided to a position opposite to the movable plate 4a. A displacement detector 4 detects an electrostatic capacitance between the plates. A servo amplifier 6 supplies to a force coil 3a, a current in an amount associated with the detection result. A current circuit and a load resistor R of the force coil 3a convert the current into a detection signal and output the signal. When the movable plate 4a and the fixed plate 4b, which are conducted to each other, are contacted, the electrostatic capacitance between the plates is removed. A processor 7 detects a change in the detection signal due to the removal of the electrostatic capacitance, and then determines that the plates are contacted.
申请公布号 JP2011012995(A) 申请公布日期 2011.01.20
申请号 JP20090155174 申请日期 2009.06.30
申请人 MITSUTOYO CORP 发明人 YAMADA TOMOHARU;NEMOTO KIICHIRO
分类号 G01H11/02 主分类号 G01H11/02
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