| 摘要 |
PROBLEM TO BE SOLVED: To provide an affected layer detector precisely detecting an affected layer of a workpiece.SOLUTION: The affected layer detector is equipped with: a sensor 10 that has a sensor head 12 having detection width W2 smaller than width W1 of an inspection surface of a workpiece 2 and outputs a signal according to the modified layer on the inspection surface; moving means 15a, 20 for relatively moving the workpiece 2 and the sensor 10 so that the sensor head 12 performs a plurality of inspections to the inspection surface; a display attribute storage means 31 for storing a display attribute according to an output signal of the sensor 10; and a display means 30 for displaying an affected layer distribution map corresponding to the inspection surface, based on the output signal by the sensor 10 and the display attribute. |
