| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a piezoelectric thin film, capable of improving the productivity by reducing the number of times of film formation and suppressing the manufacturing cost.SOLUTION: In this manufacturing method, since carboxylic acid plays a role of a solvent and a stabilizing agent, the ratio of carboxylic acid to lead acetate and an organic metal compound can be reduced, to improve the concentration of the lead acetate and organic compound in a colloid solution 71. The method can thicken the film thickness of a piezoelectric thin film 70, obtained by a series of processes, including an applying step (S2) for applying the colloid solution 71 having a high concentration; a drying step (S3) for drying the colloid solution 71, to obtain a dry film 72; a temporary baking step (S4) for reducing the dry film 72 to obtain an inorganic film 73; and a crystallizing annealing step (S5) for crystallizing the inorganic film 73. Accordingly, the number of times of film formation for obtaining a predetermined film thickness can be reduced, thereby the method for manufacturing a piezoelectric thin film 70, having improved productivity and suppressing manufacturing cost is obtained. |
