| 摘要 |
PROBLEM TO BE SOLVED: To provide a sterilization device effectively sterilizing a fluid by using a microplasma generating means.SOLUTION: The sterilization device 1 is composed of a fluid driving means 3 for letting the target fluid flow, the microplasma generating means 4, and an ozonolysis/removing means 5 disposed on the downstream side of the microplasma generating means 4. The microplasma generating means 4 is composed of a pair of electrode plates 40 disposed approximately parallel to each other, across a sterilization channel 2, and a voltage applying device 42 for applying plasma generating voltage to the electrode plates 40. Through-holes 41 through which the target fluid can pass are formed in the thickness direction of the electrode plate 40 in each of the pair of electrode plates 40. The target fluid passing through the through-holes 41 passes through the ozonolysis/removing means 5 while dielectric films are formd on the surface of the electrode plates 40 and microplasma is formed by the microplasma generating means 4. |
