发明名称 COMPOSITION FOR SELF-ASSEMBLED MONOLAYER AND METHOD OF MANUFACTURING THIN FILM TRANSISTOR USING THE SAME
摘要 PURPOSE: A self-assembled monolayer composition is provided to increase processing efficiency by enhancing a formation rate of the self-assembled monolayer and to improve properties of a thin film transistor. CONSTITUTION: A self-assembled monolayer composition comprises an alkoxy silane compound, base catalyst and organic solvent. A method for manufacturing a thin film transistor comprises the steps of: forming a gate electrode; forming a gate insulating layer on the gate electrode; forming a source electrode and a drain electrode on the gate insulating layer; forming the self-assembled monolayer on the gate insulating layer using the composition for a self-assembled monolayer; and forming an organic semiconductor on the self-assembled monolayer.
申请公布号 KR20110006514(A) 申请公布日期 2011.01.20
申请号 KR20090064178 申请日期 2009.07.14
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 YOO, BYUNG WOOK;PARK, JEONG IL;KOO, BON WON;KIM, DO HWAN;LEE, SANG YOON;LEE, BANG LIN;LEE, JI YOUL
分类号 H01B3/18;H01L29/786 主分类号 H01B3/18
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