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发明名称
METHOD FOR FORMING OXIDE FILM AND ELECTRONIC DEVICE MATERIAL
摘要
申请公布号
KR100783840(B1)
申请公布日期
2007.12.10
申请号
KR20057000687
申请日期
2005.01.14
申请人
发明人
分类号
H01L21/316
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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