| 摘要 |
The pellicle inspection device of the present invention is a device that detects damage to a pellicle film disposed on an original. The pellicle inspection device includes a measuring unit configured to measure a natural vibration frequency of the pellicle film, wherein the pellicle inspection device detects damage to the pellicle film based on the value of the natural vibration frequency measured by the measuring unit. In this case, the measuring unit includes, for example, a vibration inducing unit configured to induce vibration in the pellicle film, and a sensor that detects the vibration induced by the vibration inducing unit. |
