| 摘要 |
A substrate treating apparatus includes a treating section, a table for receiving a FOUP (Front Opening Unified Pod) storing the substrates, and an attaching and detaching unit for a lid to/from an access opening of the FOUP placed on the table. A transport unit is movable to a transfer position opposed to the access opening of the FOUP, and has support members for supporting the substrates, the transport unit transporting the substrates held by the support members between the treating section and the FOUP. A substrate detecting unit detects the substrates stored in the FOUP with the lid detached, a support member detecting unit detects the support members of the transport unit, and a control unit determines whether to transport the substrates, with the lid detached and the transport unit moved to the transfer position, based on detection of the substrates, and detection of the support members. |
