发明名称 METHOD FOR SYNTHESIS OF POLYCRYSTALLINE SILICON
摘要 FIELD: chemistry. ^ SUBSTANCE: invention can be used in production semiconductor materials, solar cells and in microelectronics. Silicon is deposited on substrates made from pure silicon, which are pre-heated with high frequency current. ^ EFFECT: obtaining highly pure silicon. ^ 2 cl, 2 dwg
申请公布号 RU2409518(C1) 申请公布日期 2011.01.20
申请号 RU20090127216 申请日期 2009.07.14
申请人 GOSUDARSTVENNOE OBRAZOVATEL'NOE UCHREZHDENIE VYSSHEGO PROFESSIONAL'NOGO OBRAZOVANIJA "TOMSKIJ POLITEKHNICHESKIJ UNIVERSITET" 发明人 LOPATIN VLADIMIR VASIL'EVICH;IVANOV NIKITA ALEKSANDROVICH;SOLDATOV ALEKSEJ IVANOVICH;PAVLOVA MARINA LEONIDOVNA
分类号 C01B33/027;C30B29/06;C30B30/02 主分类号 C01B33/027
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