发明名称 |
METHOD FOR SYNTHESIS OF POLYCRYSTALLINE SILICON |
摘要 |
FIELD: chemistry. ^ SUBSTANCE: invention can be used in production semiconductor materials, solar cells and in microelectronics. Silicon is deposited on substrates made from pure silicon, which are pre-heated with high frequency current. ^ EFFECT: obtaining highly pure silicon. ^ 2 cl, 2 dwg |
申请公布号 |
RU2409518(C1) |
申请公布日期 |
2011.01.20 |
申请号 |
RU20090127216 |
申请日期 |
2009.07.14 |
申请人 |
GOSUDARSTVENNOE OBRAZOVATEL'NOE UCHREZHDENIE VYSSHEGO PROFESSIONAL'NOGO OBRAZOVANIJA "TOMSKIJ POLITEKHNICHESKIJ UNIVERSITET" |
发明人 |
LOPATIN VLADIMIR VASIL'EVICH;IVANOV NIKITA ALEKSANDROVICH;SOLDATOV ALEKSEJ IVANOVICH;PAVLOVA MARINA LEONIDOVNA |
分类号 |
C01B33/027;C30B29/06;C30B30/02 |
主分类号 |
C01B33/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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