发明名称 SEMICONDUCTOR APPARATUS AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor apparatus by which peeling of an insulating layer laminated on an upper surface of a semiconductor substrate is suppressed, and to provide a method of manufacturing the same.SOLUTION: The semiconductor apparatus 10 has the semiconductor substrate 12 having an element formation region 14 around which a scribe region 34 is arranged, at least one wiring layer formed on the semiconductor substrate 12 via the insulating layer, a seal ring 36 formed so as to surround the element formation region 14, a rewiring 48 connected with a pad consisting of the top-layer wiring layer, and a second resin layer 32 covering the rewiring 48. In addition, in the scribe region 34, a removal region 38 is provided by removing an oxide film 16 covering the upper surface of the semiconductor substrate 12 and each insulating layer.
申请公布号 JP2011014605(A) 申请公布日期 2011.01.20
申请号 JP20090155367 申请日期 2009.06.30
申请人 SANYO ELECTRIC CO LTD;SANYO SEMICONDUCTOR CO LTD 发明人 AMATATSU YOSHIMASA;IKEDA DAISUKE
分类号 H01L23/12;H01L21/301 主分类号 H01L23/12
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