| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and method capable of reliably sticking an adhesive sheet on an adherend, while preventing a defect in adhesion without performing complicated control.SOLUTION: When a mounting sheet MS is stuck on a reverse surface WB of a wafer W by a sheet sticking device 1, a pressing roller 51 is vibrated by a vibration body 53 and an adhesive can thereby be applied well following up fine irregularities of an adherend surface AS to increase a degree of adhesion of the adhesive of the sheet to the adherend surface AS, thereby reliably sticking the mounting sheet MS. |
