发明名称 |
VERFAHREN ZUR VERARBEITUNG VON ORGANISCHEN KRISTALLEN |
摘要 |
<p>The short-pulse laser light 9 emitted from the short-pulse laser light source 1 is focused on and caused to irradiate an organic crystal 8 contained in a sample container 6 via a shutter 2, intensity adjusting element 3, irradiation position control mechanism 4, and focusing optical system 5. The sample container 6 is carried on a stage 7, and can be moved in three dimensions along the x axis, y axis and z axis in an x-y-z orthogonal coordinate system with the direction of the optical axis being taken as the z axis; furthermore, the sample container 6 can be rotated about the z axis. Working of the organic crystal 8 is performed by means of short-pulse laser light that is focused on and caused to irradiate the surface of the organic crystal 8. Prior to working, nitrogen is caused to jet onto the sample container 6 by a low-temperature gas jet device C that is a cooling device; consequently, the organic crystal 8 is cooled to -150°C or below. As a result, it is possible to work the object of working in a fixed state, and to increase the working efficiency by means of the short-pulse laser light that is used.</p> |
申请公布号 |
DE602005025201(D1) |
申请公布日期 |
2011.01.20 |
申请号 |
DE20056025201T |
申请日期 |
2005.03.30 |
申请人 |
NIKON CORP.;ADACHI, HIROAKI;SASAKI, TAKATOMO;MORI, YUSUKE;TAKANO, KAZUFUMI;INOUE, TSUYOSHI;MATSUMURA, HIROYOSHI |
发明人 |
ADACHI, HIROAKI;KITANO, HIROSHI |
分类号 |
B23K26/12;B23K26/00;B23K26/03;B23K26/06;B23K26/14;B23K26/38;B23K26/40;C07D213/84;C08J3/18;G01N1/28;G01N23/20 |
主分类号 |
B23K26/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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