发明名称 |
METHOD OF MANUFACTURING METAL LAMINATED STRUCTURE |
摘要 |
PROBLEM TO BE SOLVED: To provide a metal laminated structure allowing thinning and efficient manufacturing, and a method of manufacturing the metal laminated structure.SOLUTION: The metal laminated structure includes first, second and third metal layers. The first metal layer is formed on one surface of the second metal layer, and the third metal layer is formed on the other surface of the second metal layer. The first metal layer contains tungsten and/or molybdenum, the second metal layer contains copper, and the third metal layer contains tungsten and/or molybdenum. The method of manufacturing the metal laminated structure is also provided. |
申请公布号 |
JP2011011366(A) |
申请公布日期 |
2011.01.20 |
申请号 |
JP20090155159 |
申请日期 |
2009.06.30 |
申请人 |
SUMITOMO ELECTRIC IND LTD;ALLIED MATERIAL CORP |
发明人 |
NITTA KOJI;MASHIMA MASATOSHI;INASAWA SHINJI;ABE YUGAKU;YOKOYAMA HIROSHI;SUWATA OSAMU;YAMAGATA SHINICHI |
分类号 |
B32B15/01;C25D3/66;C25D5/10;C25D7/00;C25D7/06;H01L23/373;H01L33/62;H01L33/64 |
主分类号 |
B32B15/01 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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