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发明名称
Method of reducing memory effects in semiconductor epitaxy
摘要
申请公布号
AU2009255307(A2)
申请公布日期
2011.01.20
申请号
AU20090255307
申请日期
2009.05.29
申请人
DOW CORNING CORPORATION
发明人
MARK LOBODA
分类号
C23C16/44;H01L21/205
主分类号
C23C16/44
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