摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus, capable of performing the process from the removal of coarse particles to the classification and collection of nano-particles by a small-sized lightweight structure and capable of measuring, for example, the exposure amount of fine particles in the breathing region of a worker with high accuracy.SOLUTION: This apparatus is constituted so that at least two first and second inertial filters 3 and 5 are respectively connected in series which are to be arranged on the upstream and downstream sides, in a solvent passing direction, and both inertial filters are respectively equipped with through-holes 3e2 and 5d2 filled with metal fibers 11 and 13. The first and second inertial filters are equipped with a structure that serve to establish the relation: D1<D2, L1<L2 and d1>d2, wherein D1 and D2 are the pore sizes of the mutual through-holes; L1 and L2 are the pore lengths of the mutual through-holes; and d1 and d2 are the fiber diameters of non-compressible fibers. The filling amount of the non-compressible fibers in the through-holes of the first inertial filter is adjusted so as to become more than that of the non-compressible fibers in the through-holes of the second inertial filter to set not only the first inertial filter as a coarse particle removing filter but also the second inertial filter as a nano-particle classifying filter. |