CERAMIC JOINED BODY, CERAMIC HEATER, ELECTROSTATIC CHUCK AND SUSCEPTOR

摘要

PROBLEM TO BE SOLVED: To provide a ceramic joined body that shows no change in characteristics of sintered compacts at or around their joint interface and is hardly deformed.SOLUTION: The ceramic joined body includes a first ceramic sintered compact and a second ceramic sintered compact that are joined to each other without using any joint material, provided that both the first and second ceramic sintered compacts essentially comprise the same component. Either one or both of the first and second ceramic sintered compacts includes an accessory component, provided that the accessory component of one of the ceramic sintered compact does not diffuse into the other ceramic sintered compact.