THERMAL MASS FLOW SENSOR WITH IMPROVED RESPONSE ACROSS FLUID TYPES

摘要

One embodiment of the present invention comprises a mass flow controller. The mass flow controller may comprise a pair of thermal sensing elements, a bridge circuit adapted to receive at least one first signal from the pair of thermal sensing elements and a differential amplifier adapted to (i) receive at least one bridge signal from the bridge circuit, and (ii) emit an output signal generally proportional to a flow rate of fluid passing through the mass flow controller. The mass flow controller is also comprised in one embodiment of a filter portion of a control module having one or more first filters comprising substantially permanent parameters adapted to provide a more accurate output signal for a baseline fluid upon a change in the flow rate and one or more second filters comprising variable parameters, with each of the one or more second filters being adapted to provide a more accurate output signal for non-baseline fluids upon a change in the flow rate.