| 摘要 |
PURPOSE: A tray annealing device is provided to uniformly anneal the overall tray by constantly maintain the temperature of a tray according to the set temperature profile. CONSTITUTION: An annealing chamber(10) is loaded with and unloaded with the processed tray. A transport unit(20) transfers the tray to inside and outside of the annealing chamber. A hot-air bower is installed on one side of the annealing chamber. A plurality of heaters is installed on the inner side of the annealing chamber.
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