| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device generating precisely and automatically a recipe for reinspection for executing reinspection, in the CD inspection of a photomask where a large number of measuring points exist.SOLUTION: The charged particle beam device for performing the automatic length measurement of a sample based on a recipe including a position coordinate of the sample and a measuring condition includes: a sample pretreatment part for executing at least either UV or ion irradiation to the sample; a measurement pretreatment part for executing at least one of addressing, auto-focus, auto-stigma, auto-brightness and auto-contrast; an inspection execution part for acquiring an SEM image of the sample; and a recipe generation part for copying a recipe used for n-th time length measurement, erasing the position coordinate by which image acquisition from the copied recipe is successful, and generating a recipe for (n+1)-th time inspection. |
