METHOD FOR DEPOSITING WATER-REPELLENT MOLD RELEASE THIN FILM AND WATER-REPELLENT MOLD RELEASE LAMINATED FILM

摘要

PROBLEM TO BE SOLVED: To provide a water-repellent mold release laminated film which has a deposited film of an organosilicon compound with water repellency and usable for various applications, and to provide a method for producing the water-repellent mold release laminated film.SOLUTION: In the method for producing a water-repellent mold release laminated film obtained by depositing a carbon-containing organosilicon compound film on a plastic base material by a plasma-enhanced chemical vapor deposition process (PE-CVD process), an organosilicon compound containing an Si-O bond in the molecule is used as a vapor deposition raw material, and plasma-enhanced chemical vapor deposition is performed in a gas atmosphere containing no oxygen atoms upon the vapor deposition of the organosilicon compound gas (in a non-oxygen-state atmosphere) in a state where the plastic base material is cooled and held to Tg or below, and the vapor deposited film of a carbon-containing silicon compound with water repellency is deposited on the plastic base material.