| 摘要 |
A method and an apparatus for efficiently mass-producing a single-wall carbon nanotube (SWCNT) film are disclosed. The SWCNT film is useful as an industrial material, at low temperature and low cost. The method and apparatus are characterized in that carbon nano-tubes (CNTs) are synthesized from a raw material source through a gas-phase chemical vapor deposition (CVD) process, and the synthesized CNTs are directly deposited on a substrate in a chamber connected with a reaction tube, thereby forming a CNT film on the substrate.
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