发明名称 |
THERMAL MASS FLOW SENSOR WITH IMPROVED RESPONSE ACROSS FLUID TYPES |
摘要 |
One embodiment of the present invention comprises a mass flow controller. The mass flow controller may comprise a pair of thermal sensing elements, a bridge circuit adapted to receive at least one first signal from the pair of thermal sensing elements and a differential amplifier adapted to (i) receive at least one bridge signal from the bridge circuit, and (ii) emit an output signal generally proportional to a flow rate of fluid passing through the mass flow controller. The mass flow controller is also comprised in one embodiment of a filter portion of a control module having one or more first filters comprising substantially permanent parameters adapted to provide a more accurate output signal for a baseline fluid upon a change in the flow rate and one or more second filters comprising variable parameters, with each of the one or more second filters being adapted to provide a more accurate output signal for non-baseline fluids upon a change in the flow rate.
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申请公布号 |
US2011015791(A1) |
申请公布日期 |
2011.01.20 |
申请号 |
US20090502918 |
申请日期 |
2009.07.14 |
申请人 |
ADVANCED ENERGY INDUSTRIES, INC. |
发明人 |
SMIRNOV ALEXEI V.;WESTRA MICHAEL LYNN;WIDENER DAX |
分类号 |
G05D7/06;H04B1/10 |
主分类号 |
G05D7/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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