发明名称 FIELD EFFECT TRANSISTOR
摘要 A novel field-effect transistor is provided which employs an amorphous oxide. In an embodiment of the present invention, the transistor comprises an amorphous oxide layer containing electron carrier at a concentration less than 1×10−18/cm3, and the gate-insulating layer is comprised of a first layer being in contact with the amorphous oxide and a second layer different from the first layer.
申请公布号 US2011012107(A1) 申请公布日期 2011.01.20
申请号 US20100882647 申请日期 2010.09.15
申请人 CANON KABUSHIKI KAISHA;TOKYO INSTITUTE OF TECHNOLOGY 发明人 SANO MASAFUMI;NAKAGAWA KATSUMI;HOSONO HIDEO;KAMIYA TOSHIO;NOMURA KENJI
分类号 H01L29/22 主分类号 H01L29/22
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