发明名称 SIDEWALL PHOTODETECTOR
摘要 <p>Sidewall photodetectors for integrated photonic devices and their method of manufacture. An embodiment includes a p-i-n film stack formed on a sidewall of a substrate semiconductor feature having sufficiently large area to accommodate the spot size of a multi-mode fiber. An embodiment includes a first sidewall photodetector coupled to a second sidewall photodetector by a waveguide, the first sidewall photodetector having an i-layer tuned to absorb a first wavelength of light incident to the first sidewall and pass a second wavelength of light to the second sidewall photodetector having an i-layer tuned to absorb the second wavelength.</p>
申请公布号 WO2011008330(A1) 申请公布日期 2011.01.20
申请号 WO2010US34755 申请日期 2010.05.13
申请人 INTEL CORPORATION;MORSE, MICHAEL T.;PANICCIA, MARIO J.;DOSUNMU, OLUFEMI 发明人 MORSE, MICHAEL T.;PANICCIA, MARIO J.;DOSUNMU, OLUFEMI
分类号 H01L31/101;H01L31/105 主分类号 H01L31/101
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