| 摘要 |
PROBLEM TO BE SOLVED: To obtain a sufficient dark-field illumination state.SOLUTION: A control unit 40 controls individually each of a plurality of micro mirrors that are two-dimensionally arranged on the surface of a light deflecting element 36, and switches between bright-field illumination and dark-field illumination, by turning on micro mirrors in a bright-field illumination region Awhen performing bright-field illumination and by turning on micro mirrors in a dark-field illumination region Awhen performing dark-field illumination. Thereby, since a region other than a dark-field illumination optical path can be prevented from being irradiated with illumination light when switching from bright-field illumination to dark-field illumination, a sufficient dark-field illumination state can be obtained. Therefore, for example, the application to a microscope performing illumination for both bright-field illumination and dark-field illumination can be performed. |
