LAMINATE AND PROCESS FOR PRODUCTION THEREOF

摘要

A laminate comprising a base material and a silicon-containing film formed on the base material, wherein the silicon-containing film has a nitrogen-rich region composed of a silicon atom and a nitrogen atom or a silicon atom, a nitrogen atom and an oxygen atom, and wherein the nitrogen-rich region is formed by irradiating a polysilazane film that has been formed on the base material with an energy ray in an atmosphere where oxygen or water vapor is not contained substantially to thereby modify at least a part of the film; and a process for producing the laminate.