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发明名称
摘要
申请公布号
JP4613382(B2)
申请公布日期
2011.01.19
申请号
JP20000051617
申请日期
2000.02.28
申请人
发明人
分类号
C30B29/06;H01L21/22;H01L21/225
主分类号
C30B29/06
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代理人
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