ELECTROMECHANICAL ELEMENT, DRIVING METHOD OF ELECTROMECHANICAL ELEMENT, AND ELECTRONIC EQUIPMENT USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a high-reliability electromechanical element that avoids generation of an adhering phenomenon (stiction) making it difficult for contacts on the electromechanical element to separate from each other to achieve excellent low-voltage drive and high-speed response. SOLUTION: The electromechanical element formed on a substrate has a first electrode 101 as well as a second electrode 102 and a third electrode 103 that are formed via a gap, wherein the first electrode can come in contact with the second electrode by applying gravity between the first electrode and the third electrode. The electromechanical element having a bent portion 108 on the first electrode can achieve high reliability that has been conventionally difficult for realization. COPYRIGHT: (C)2009,JPO&INPIT