| 摘要 |
Provided are a tilted vibration sensor incorporating a plurality of electrodes and a conductive spherical body which is turned on and off by the moving displacement of the spherical body, and which may be remarkably reduced in size and may have high performance and high operating sensitivity, high durability, and high reliability; and a method of manufacturing the sensor. The case (1) of the sensor comprises a case body (5) formed of a non-conductive material having such excellent gas-barrier property and heat resistance that can stop the transmission of gases which affects on the on/off operation of the sensor due to the moving displacement of the conductive spherical body (4) and a cover body (7) sealing airtight the opening part (6) of the case body. In the method of manufacturing the vibration sensor, moisture and particulate impurities affecting the on/off operation are removed from the hollow part (2) of the case (1), and the hollow part is evacuated. |
