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发明名称
METHOD AND EQUIPMENT FOR PRODUCING GROUP-III NITRIDE
摘要
申请公布号
EP2123801(A4)
申请公布日期
2011.01.19
申请号
EP20070792325
申请日期
2007.08.03
申请人
TOKUYAMA CORPORATION
发明人
NAGASHIMA, TORU;TAKADA, KAZUYA;YANAGI, HIROYUKI;HARADA, MANABU;HIRATA, YASUNORI;KONDO, KEISUKE
分类号
C30B29/38;C23C16/34;C23C16/455;C30B25/14;C30B25/16;H01L21/205
主分类号
C30B29/38
代理机构
代理人
主权项
地址
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