| 摘要 |
PROBLEM TO BE SOLVED: To solve the problems that high precision is required by a heater pattern formation process and the formation is hard to form, because a gas sensor, which has a diaphragm structure for retaining a gas sensitive film at a high temperature and detecting gas concentration in the conventional heater, has no a mechanism to measure a heater temperature and therefore, forms film thickness in a heater constituent material and width in a heat pattern with high precision and then maintains the heater temperature constantly with a method for supplying constant power to a heater, so as to maintain a heater resistance value in a certain definite range. SOLUTION: In the gas sensor, the hot junction of a thermocouple composed of two kinds of materials is formed in the vicinity of the heater and a thermopile with a cold junction is formed, which is formed on an ambient heat sink. COPYRIGHT: (C)2009,JPO&INPIT
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