POLYMER FOR FORMING ORGANIC ANTI-REFLECTIVE COATING LAYER HAVING HIGH REFRACTIVE INDEX, AND COMPOSITION INCLUDING THE SAME

摘要

A polymer for forming an organic anti-reflective coating layer having high refractive index, and a composition including the same and a method using the composition are provided to ensure excellent adhesive power with substrate and high refractive index. A polymer for forming an organic anti-reflective coating layer having high refractive index comprises a repeating unit represented by the chemical formula 1. In the chemical formula 1, R1 is hydrogen (H) or methyl group; R2 is S, O or NH; and R4 is -OH. A composition for forming the organic anti-reflective coating layer comprises 0.1~69.9 weight% of the polymer for forming an organic anti-reflective coating layer represented by the chemical formula 1; 0.1~30 weight% of a light absorbing agent absorbing exposure light; and 30~99.8 weight% of organic solvent dissolving the polymer for forming an organic anti-reflective coating layer.