| 摘要 |
The micro-mechanical coriolis rotary speed sensor has components around measuring axes in three orthogonal spatial directions. A substrate (7), a detection mass (3) and two drive masses (4a,4b,4c,4d) are provided, where the drive masses are driven relative to the substrate in a primary motion. The detection mass is coupled with the drive masses. An independent claim is included for a method for detecting rotary speed in three mutually orthogonal spatial directions. |
