| 摘要 |
PROBLEM TO BE SOLVED: To provide a detection sensor and an oscillator capable of enhancing the sensitivity. SOLUTION: A system is adopted, wherein a driving/detection part 40 is provided on a part of the surface of the vibrator 30, and the vibrator 30 is driven. As a result of this, impediment of vibration of the vibrator 30 caused by a piezoelectric layer, a drive electrode, or the like, is suppressed, and the Q-value of the vibrator 30 is improved, and further, the sensitivity of the detection sensor 10 is set higher. When the sensitivity is of comparable level, a much smaller detection sensor 10 than the conventional types can be realized. COPYRIGHT: (C)2009,JPO&INPIT
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