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发明名称
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
摘要
申请公布号
KR101009338(B1)
申请公布日期
2011.01.19
申请号
KR20090044884
申请日期
2009.05.22
申请人
发明人
分类号
H01L21/28;H01L21/3205
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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