发明名称 |
Substrate storage container |
摘要 |
<p>A substrate storage container comprises: a container casing having an aperture through which a plurality of substrates are placed in or taken out; a cover adapted to fit into the aperture of the container casing; a sealing gasket capable of elastic deformation provided between the container casing and the cover, and a retainer, mounted on the cover, capable of retaining the periphery of the substrates. The retainer has: a supporting body mounted on the inside face of the cover; a plurality of elastic pieces provided in elastically deformable fashion on the supporting body; and a block provided on each of the elastic pieces, the block retaining the periphery of one of the substrates. A relation 10.8 × w < y < 34.3 × w is satisfied when a substrate retaining force of each of the elastic pieces is y [unit: N] and a weight per the substrate is w [unit: kg].
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申请公布号 |
EP1605496(A3) |
申请公布日期 |
2011.01.19 |
申请号 |
EP20050253594 |
申请日期 |
2005.06.10 |
申请人 |
SHIN-ETSU POLYMER CO., LTD. |
发明人 |
HASEGAWA, AKIHIRO;MIMURA, HIROSHI |
分类号 |
B65D85/86;H01L21/00;H01L21/673 |
主分类号 |
B65D85/86 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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