发明名称 Fin field effect transistor and method of manufacturing the same
摘要 Provided are a FinFET and a method of manufacturing the same. A FinFET may include at least one active fin, at least one gate insulating layer pattern, a first electrode pattern, a second electrode pattern and at least one pair of source/drain expansion regions. The at least one active fin may be formed on a substrate. The at least one gate insulating layer pattern may be formed on the at least one active fin. The first electrode pattern may be formed on the at least one gate insulating layer pattern. Further, the first electrode pattern may be intersected with the at least one active fin. The second electrode pattern may be formed on the first electrode pattern. Further, the second electrode pattern may have a width greater than that of the first electrode pattern. The at least one pair of source/drain expansion regions may be formed on a surface of the at least one active fin on both sides of the first electrode pattern. Thus, the FinFET may have improved capacity and reduced GIDL current.
申请公布号 US7871875(B2) 申请公布日期 2011.01.18
申请号 US20100662083 申请日期 2010.03.30
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM SUNG-MIN;KIM MIN-SANG;LEE JI-MYOUNG;KIM DONG-WON
分类号 H01L21/336;H01L21/8234 主分类号 H01L21/336
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