| 摘要 |
A liquid discharger and corresponding method includes an air feed line connected to a refrigerant circulation line. When changing a setpoint of a target, when a temperature of the refrigerant rises to reach a first predetermined temperature lower than or equal to a boiling point of the refrigerant, the circulation of the refrigerant is stopped, one of air and an inert gas is fed from an air feed line to the refrigerant circulation line so as to discharge the refrigerant in a target, and simultaneously, the temperature of the target continues to be raised with a heater. When the temperature of the target rises to reach a second predetermined temperature higher than the boiling point of the refrierant, the one of the air and inert gas is again fed from the air feed line to the refrigerant circulation line so as to discharge the refrigerant remaining in the target.
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