发明名称 Method of fabricating gate configurations for an improved contacts in nanowire based electronic devices
摘要 Methods, systems, and apparatuses for electronic devices having improved gate structures are described. An electronic device includes at least one nanowire. A gate contact is positioned along at least a portion of a length of the at least one nanowire. A dielectric material layer is between the gate contact and the at least one nanowire. A source contact and a drain contact are in contact with the at least one nanowire. At least a portion of the source contact and/or the drain contact overlaps with the gate contact along the nanowire the length. In another aspect, an electronic device includes a nanowire having a semiconductor core surrounded by an insulating shell layer. A ring shaped first gate region surrounds the nanowire along a portion of the length of the nanowire. A second gate region is positioned along the length of the nanowire between the nanowire and the substrate. A source contact and a drain contact are coupled to the semiconductor core of the nanowire at respective exposed portions of the semiconductor core.
申请公布号 US7871870(B2) 申请公布日期 2011.01.18
申请号 US20100703043 申请日期 2010.02.09
申请人 NANOSYS, INC. 发明人 MOSTARSHED SHAHRIAR;CHEN JIAN;LEON FRANCISCO A.;PAN YAOLING;ROMANO LINDA T.
分类号 H01L21/00;H01L27/108 主分类号 H01L21/00
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