发明名称 Reactive chemical containment system
摘要 A small scale, but effective, reactive chemical containment system includes apparatus and methods for reaction of process gases exhausted from reaction furnaces with a reactant gas in a non-combustible manner to produce and contain particulate or powder byproducts, thereby removing the process gas from the exhaust gas flow. The apparatus provides process gas inlet, treatment reactive gas diffusion, process gas and treatment reactive gas pre-mixing, primary containment, secondary containment, and outlet zones.
申请公布号 US7871587(B2) 申请公布日期 2011.01.18
申请号 US20090645455 申请日期 2009.12.22
申请人 MKS INSTRUMENTS, INC. 发明人 GU YOUFAN;DOZORETZ PAUL
分类号 B01D53/38;B01D53/68;B01D53/76 主分类号 B01D53/38
代理机构 代理人
主权项
地址