| 摘要 |
A chemical liquid supplying apparatus can discharge chemical liquid with high accuracy and monitor a leakage of an incompressible medium from a region between a piston and a cylinder. A pump has a flexible tube for partitioning a pump chamber and a drive chamber, and the incompressible medium is supplied to the drive chamber by the piston reciprocating in a cylinder hole of the cylinder. A bellows cover is provided between the piston and the cylinder, and forms a seal chamber contiguous to a sliding face of the piston. A seal-chamber pressure sensor is attached to the cylinder so as to detect the pressure of the incompressible medium for sealing enclosed in the seal chamber, and a deterioration degree of a seal member is determined by detecting the pressure in the seal chamber.
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