MICROELECTROMECHANICAL DEVICE INCLUDING PYROLYZED POLYMER STRUCTURE AND METHOD FOR FABRICATING THE SAME

摘要

PURPOSE: A micro electromechanical device including a pyrolytic carbon structure and a manufacturing method thereof are provided to use UV ink with high viscosity during screen printing to obtain a scattered reflection effect, thereby preventing deformation of a UV ink layer which forms a scattered reflection layer during background printing. CONSTITUTION: A micro electromechanical device includes a substrate(10), an insulating layer(20), a pyrolytic carbon layer(55), an electrode(70), and a cavity(90). The substrate comprises the first side and the second side parallel with the first side. The insulating layer is formed on the second side of the substrate. The pyrolytic carbon layer is formed on the insulating layer. The electrode is formed on the insulating layer. The cavity is formed between the first side of the substrate and the pyrolytic carbon layer.