UNIT FOR COLLECTING LIQUID AND APPARATUS FOR TREATING SUBSTRATE WITH THE SAME,申请号KR20080111006-传众专利搜索

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发明名称	UNIT FOR COLLECTING LIQUID AND APPARATUS FOR TREATING SUBSTRATE WITH THE SAME
摘要
申请公布号	KR101008678(B1)	申请公布日期	2011.01.17
申请号	KR20080111006	申请日期	2008.11.10
申请人		发明人
分类号	H01L21/302;H01L21/304	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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